Description
| Product Name: Boron Trichloride BCl3 | ||
| Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT) | ||
| Filling Content: 50kg/cyl | ||
| Items | Specifications | |
| BCl3 | 99.9% | 99.999% |
| Cl2 | ≤100 ppmw | – |
| COCl2 | ≤100 ppmw | – |
| O2 | – | ≤1.0 ppmv |
| N2 | – | ≤1.0 ppmv |
| CO2 | – | ≤1.0 ppmv |
| CO | – | ≤1.0 ppmv |
| H2O | – | – |
| Transportation | ||
| DOT Shipping Name | Boron Trichloride | |
| DOT Classification | 2.3 | |
| DOT Label | Poisonous gas/breathing hazard, corrosive | |
| UN Number | UN1741 | |
| CAS No. | 10294-34-5 | |
| CGA/DISS/JIS/BS341/DIN477 | 660/634/W22-14L | |
| Shipped as | Liquefied Gas | |
| Technical Information | ||
| Cylinder State @ 21.1°C | Liquid | |
| Flammable Limits In Air | Non-flammable | |
| Auto Ignition Temperature (°C ) | – | |
| Molecular Weight (g/mol) | 117.17 | |
| Specific gravity (air =1) | 4.04 | |
| Critical Temperature ( °C ) | 178.8 | |
| Critical Pressure ( psig ) | 546.6 | |
| Applications | ||
| . In semiconductor manufacturing, boron trichloride is used for p-type diffusion on silicon wafers. . Ion implantation. . Metal plasma etching. . In various chemical reactions. |
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