| Product Name: Nitrogen Trifluoride NF3 |
| Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content: 20kg/cyl |
| Items |
Specifications |
| NF3 |
99.99% |
| O2 |
≤3.0 ppmv |
| N2 |
≤5.0 ppmv |
| CO2 |
≤1.0 ppmv |
| CO |
≤1.0 ppmv |
| CH4 |
≤1.0 ppmv |
| H2O |
≤1.0 ppmv |
| CF4 |
≤1.0 ppmv |
| N2O |
≤2.0 ppmv |
| SF6 |
≤1.0 ppmv |
| HF |
≤1.0 ppmv |
|
| Transportation |
| DOT Shipping Name |
Nitrogen Trifluoride |
| DOT Classification |
2.2 |
| DOT Label |
Nonflammable Gas and Oxidizer |
| UN Number |
UN 2451 |
| CAS No. |
7783-54-2 |
| DISS/JIS/DIN477 |
640/W22-14L/NO.6 |
| Shipped |
Liquefied Gas |
|
| Technical Information |
| Cylinder State @ 21.1°C |
Gas |
| Flammable Limits In Air |
Non-flammable |
| Auto Ignition Temperature (°C ) |
– |
| Molecular Weight (g/mol) |
71 |
| Specific gravity (air =1) |
2.46 |
| Critical Temperature ( °C ) |
-39.15 |
| Critical Pressure ( psig ) |
632.19 |
|
| Applications |
| Used for cleaning CVD Chamber or etching vapor deposition layer ( film ) during the production process of semiconductor ,TFT -LCD and solar cell. |
